Dynamic characteristics of ion beam sputtered thin-film pressure transducer

离子束溅射 薄膜压力 传感器的动态特性

Development and performance Test of a Thin-Film Temperature TranSducer

一种 薄膜温度 传感器的研制与性能试验

High Integration Thin-film Pressure Transducer Design and Technology

高性能 薄膜压力 传感器设计与工艺

But when excited by wide periodical-rectangle-wave pressure the sample thin-film transducer gives a distorted response .

但在宽脉冲方波气压激励下，所用溅射 薄膜 压力 传感器出现响应失真现象。